感兴趣的主题包括但不限于:尺寸从微米到毫米不等的设备、ic兼容制造技术、其他制造技术、微现象测量、理论结果、新材料和设计、微执行器、微机器人、微电池、轴承、磨损、可靠性、电气互连、微操作操作以及适用于MEMS的标准。流体学、光学、生物医学工程等领域的应用实例和面向应用的器件也是人们关注的焦点。
The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.